三(乙基甲氨基)(叔丁基亚氨基)钽(V)，98%，≥99.99% metal basis, 用于CVD/ALD, 钢瓶订购和清洗请见详情页

(t-Butylimido)tris(ethylmethylamino)tantalum(V), 98%, ≥99.99% metal basis, for CVD/ALD, please refer to the details page for ordering and cleaning cylinder

仅供研发或工业应用，不可直接用于食品、药品、临床诊断或治疗。